Aerosol Assisted Chemical Vapour Deposition (AACVD) of Zinc dichalcogenoimidodiphosphinate Complexes for the Deposition of Zinc Selenide Thin Films

Abstract

Dichalcogenoimidodiphosphinate complexes of zinc [Zn{(EPiPr2)2N}2], [E=Se,Se; S,Se] were synthesized through meta-thetical reactions from the dichalcogenoimidodiphosphinateligands [(EE’PiPr2NH)] (E, E’=Se, Se; S, Se). These complexes werecharacterized and used as single-source precursors throughAerosol-Assisted Chemical Vapour Deposition (AACVD) for thedeposition of cubic zinc selenide (ZnSe) films on glasssubstrates. The deposition temperature occurred at 500 and525 °C, while the flow rates of the carrier gas was 160 and240 standard cubic centimetre (sccm). The morphology of thedeposited films ranged between dense fibrous network andwoven fibres. X-ray photoelectron spectroscopy (XPS) con-firmed the presence of the constituent elements in zincselenide.